Compensation value for acceleration in positive motion direction (P-COMP-00087)

P-COMP-00087

Compensation value for acceleration in positive motion direction

Description

Compensation value at position i for acceleration in positive motion direction.

Parameter

kw.crosstalk.position[i].correction_accelerate_dir_pos

Data type

SGN64

Data range

MIN(SGN64) = P-COMP-00087 < MAX(SGN64)

Axis types

T

Dimension

T: [0.1 µm]

R, S: -

Default value

0

Remarks

Parameter available as of V3.1.3081.2 and V3.1.3108.4