Contour error on segmentation of circular blocks (P-CHAN-00138)

P-CHAN-00138

Contour error when circular blocks are segmented (HSC)

Description

This parameter defines the permissible contour error when circular blocks are segmented. Depending on P-CHAN-00136 , either the secant error or the path length of the segment is specified.

Parameter

hsc.gen.circular_param

Data type

UNS32

Data range

1 ... MAX(UNS32)

Dimension

0.1µm

Default value

50

Remarks