Contour error in the case of segmentation of circular blocks(P-CHAN-00138)
The "circular_param" parameter determines the permissible contour error in the case of segmentation of circular blocks. Depending on P-CHAN-00136, either the secant error or the path length of the segment is specified.
Variable name | Type | Permitted range | Dimension |
circular_param | UNS32 | 1 .MAX(UNS32) | 0.1µm |
Default value
50