Minimum tool length (P-CHAN-00156)

If this parameter is unequal to zero, the length of the new requested tool is checked for this minimum value. If the tool length is fallen below the limit, the error message P-ERR-21426 "Tool length is smaller than minimum limit value" is output.

The limit value must be programmed in the dimension 0,1 µm.

Variable name

Type

Permitted range

Dimension

minimum_length

UNS32

0 < minimum_length < MAX(UNS32)

0.1µm